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Title: Characterization of High-k Dielectrics and Interfaces on Device Reliability
Authors: Seo, Hyungtak
Advisors: Dr. Carl Osbrun, Committee Chair
Dr. Gerald Lucovsky, Committee Co-Chair
Dr. David Aspnes, Committee Member
Dr. Veena Misra, Committee Member
Keywords: High-k Dielectrics MOSFET Spectrosopic Ellipsometr
Issue Date: 22-Aug-2008
Degree: PhD
Discipline: Electrical Engineering
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