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Please use this identifier to cite or link to this item: http://www.lib.ncsu.edu/resolver/1840.16/4052

Title: Optimization of Metal Gate Electrode Stacks for Work Function Tuning
Authors: Lee, JaeHoon
Advisors: Doug Barlage, Committee Member
Veena Misra, Committee Chair
Carlton Osburn, Committee Member
Gregory Parsons, Committee Member
Keywords: work function
high-k
tunung
metal gate
Ru
Ta
Ru-Ta
stack
Issue Date: 22-Aug-2007
Degree: PhD
Discipline: Electrical Engineering
URI: http://www.lib.ncsu.edu/resolver/1840.16/4052
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