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Title: A Markov Chain Framework for Approximation of Cycle Time in Semiconductor Manufacturing Toolsets.
Authors: Akhavan-Tabatabaei, Raha
Advisors: Yahya Fathi, Committee Chair
James Wilson, Committee Member
Charles Culbreth Jr, Committee Member
Reha Uzsoy, Committee Member
SHANTIKUMAR, J. GEORGE (E), Committee Member
Janice Wells, Committee Member
Issue Date: 11-Nov-2010
Degree: Doctor of Philosophy
Discipline: Industrial Engineering
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