Atomic Layer Deposition and Nucleation of Metals and Metal Oxides: Selective Area Reactions and Conformal 3D Processing.

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Title: Atomic Layer Deposition and Nucleation of Metals and Metal Oxides: Selective Area Reactions and Conformal 3D Processing.
Author: Kalanyan, Berc
Advisors: Gregory Parsons, Chair
Peter Fedkiw, Member
Michael Dickey, Member
Walter Weare, Member
Date: 2014-12-16
Degree: Doctor of Philosophy
Discipline: Chemical Engineering
URI: http://www.lib.ncsu.edu/resolver/1840.16/10117


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