Atomic Layer Deposition and Nucleation of Metals and Metal Oxides: Selective Area Reactions and Conformal 3D Processing.
| Title: | Atomic Layer Deposition and Nucleation of Metals and Metal Oxides: Selective Area Reactions and Conformal 3D Processing. |
| Author: | Kalanyan, Berc |
| Advisors: | Gregory Parsons, Chair Peter Fedkiw, Member Michael Dickey, Member Walter Weare, Member |
| Date: | 2014-12-16 |
| Degree: | Doctor of Philosophy |
| Discipline: | Chemical Engineering |
| URI: | http://www.lib.ncsu.edu/resolver/1840.16/10117 |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
| etd.pdf | 9.353Mb |
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