Investigation of the Transient Regions of Multi-Source Pulsed RF Capacitively Coupled Plasma Discharges.

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Title: Investigation of the Transient Regions of Multi-Source Pulsed RF Capacitively Coupled Plasma Discharges.
Author: Kummerer, Theresa
Advisors: Steven Shannon, Chair
Mohamed Bourham, Member
Jerome Cuomo, Member
Date: 2015-03-20
Degree: Master of Science
Discipline: Nuclear Engineering
URI: http://www.lib.ncsu.edu/resolver/1840.16/10255


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