High Throughput Atomic Layer Deposition Processes: High Pressure Operations, New Reactor Designs, and Novel Metal Processing.

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Title: High Throughput Atomic Layer Deposition Processes: High Pressure Operations, New Reactor Designs, and Novel Metal Processing.
Author: Mousa, Moatazbellah Mahmoud
Advisors: Gregory Parsons, Chair
Michael Dickey, Member
Saad Khan, Member
Jesse Jur, Member
Date: 2015-09-10
Degree: Doctor of Philosophy
Discipline: Chemical Engineering
URI: http://www.lib.ncsu.edu/resolver/1840.16/10637


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