Statistical Analysis of Novel Dielectric Materials for Microelectronics

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dc.contributor.advisor Yahya Fathi, Committee Co-Chair en_US
dc.contributor.advisor Victor Zhirnov, Committee Member en_US
dc.contributor.advisor Jon-Paul Maria, Committee Co-Chair en_US
dc.contributor.advisor Thomas Johnson, Committee Member en_US
dc.contributor.advisor James Wilson, Committee Member en_US Hunt-Lowery, Alisa en_US 2010-04-02T18:02:01Z 2010-04-02T18:02:01Z 2005-02-21 en_US
dc.identifier.other etd-09212004-100243 en_US
dc.description.abstract This research analyzes the re-oxidation annealing process of Barium titanate thin films on copper foils made by Chemical Solution Deposition. During this anneal, the temperature and oxygen pressure settings must be optimized to ensure the elimination of oxygen vacancies without oxidizing the copper foil substrate. This research utilizes Design of Experiments (DOE) to study the impact of re-oxidation furnace temperature and pressure on the dielectric loss tangent response. Two designs of experiments were run. The first experiment, a 32 DOE, examined a large range of temperature and pressure levels. Due to the high susceptibility of uncontrollable factors such as humidity and film position in the crystallization anneal furnace, an adequate model could not be developed. However, the temperature at 550°C and a pressure of 10-5 Torr yielded a lower mean and standard deviation of the loss tangent response. A second and smaller scale experiment, a 22 with a center point, was run around 550°C and 10-5 Torr to determine if more optimal temperature and pressure settings existed in the local area. Two second order response surface models were developed from two crystallization anneals that were statistically significant. The most significant finding was that the optimum level for temperature and pressure in the re-oxidation anneal furnace in this experiment is 550°C and 2x10-5 Torr. While the models concluded that the temperature, pressure, temperature quadratic, and interaction between pressure and temperature were important effects in the model, there were differences in the curvature of the models due to the temperature quadratic effect. en_US
dc.rights I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to NC State University or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report. en_US
dc.subject design of experiments en_US
dc.subject response surfaces en_US
dc.subject dielectrics en_US
dc.title Statistical Analysis of Novel Dielectric Materials for Microelectronics en_US MS en_US thesis en_US Industrial Engineering en_US

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