FINAL Microstructure-Property Study of Cu1-xTax Thin Films

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Title: FINAL Microstructure-Property Study of Cu1-xTax Thin Films
Author: Jackson, Shannon Marie
Advisors: J.M. Rigsbee, Committee Chair
Zlatko Sitar, Committee Member
Afsaneh Rabiei, Committee Member
Abstract: A series of Cu1-xTax (x = 0.05 to 0.5) thin films have been produced by DC magnetron sputter deposition using co-deposition (alloy) and sequential (layered) deposition modes at ambient temperature. The nanoscale microstructures of these non-equilibrium "alloy" films have been investigated chemically and structurally using x-ray diffraction, scanning electron microscopy and high-resolution transmission electron microscopy. The mechanical properties were measured via nanotriboligical and nanoindentation studies of selected samples to determine the affect of Ta composition and nanolayer thickness.
Date: 2007-07-26
Degree: MS
Discipline: Materials Science and Engineering

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