Cesium Neutral Beam and Surface Oxidation Effects on SIMS Analysis at Surface of Silicon

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Title: Cesium Neutral Beam and Surface Oxidation Effects on SIMS Analysis at Surface of Silicon
Author: Penley, Christopher R
Advisors: Dieter P. Griffis , Committee Member
Phillip E. Russell, Committee Member
John M. Mackenzie, Committee Member
J. Michael Rigsbee, Committee Chair
Abstract:
Date: 2008-09-22
Degree: MS
Discipline: Materials Science and Engineering
URI: http://www.lib.ncsu.edu/resolver/1840.16/2716


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