Experimental and Computational Studies of Carbon Sputtering with Application to Deposition of Tetrahedrally Bonded Amorphous Carbon Films

Show full item record

Title: Experimental and Computational Studies of Carbon Sputtering with Application to Deposition of Tetrahedrally Bonded Amorphous Carbon Films
Author: Jonsen, Daniel Everett
Advisors: Jerome J. Cuomo, Chair
Donald W. Brenner, Member
Mohamed A. Bourham, Minor Rep., Member
Gary L. Doll, Member
Ronald O. Scattergood, Member
Abstract: In this work, amorphous carbon films are deposited on various substrates by ion beam sputtering of a graphite target. In addition, computational studies of the carbon sputtering process are performed using a molecular dynamics simulation program. In both cases, several process parameters are varied with the intent to find the optimum conditions for the sputter deposition of amorphous carbon films of high sp content amorphous carbon films.
Date: 2001-08-07
Degree: PhD
Discipline: Materials Science and Engineering
URI: http://www.lib.ncsu.edu/resolver/1840.16/3336


Files in this item

Files Size Format View
etd.pdf 1.667Mb PDF View/Open

This item appears in the following Collection(s)

Show full item record