Spectroscopic Investigation of Hf-Si Oxynitride Alloys and Low Temperature Cobalt Metal ALD

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Title: Spectroscopic Investigation of Hf-Si Oxynitride Alloys and Low Temperature Cobalt Metal ALD
Author: Oh, Sang Jeong
Advisors: Gregory N. Parsons, Committee Co-Chair
Mehmet C. Ozturk, Committee Member
Nadia Elmasry, Committee Member
Jon Paul Maria, Committee Co-Chair
Abstract:
Date: 2008-04-21
Degree: PhD
Discipline: Materials Science and Engineering
URI: http://www.lib.ncsu.edu/resolver/1840.16/3677


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