Spectroscopic Investigation of Hf-Si Oxynitride Alloys and Low Temperature Cobalt Metal ALD

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dc.contributor.advisor Gregory N. Parsons, Committee Co-Chair en_US
dc.contributor.advisor Mehmet C. Ozturk, Committee Member en_US
dc.contributor.advisor Nadia Elmasry, Committee Member en_US
dc.contributor.advisor Jon Paul Maria, Committee Co-Chair en_US
dc.contributor.author Oh, Sang Jeong en_US
dc.date.accessioned 2010-04-02T18:34:25Z
dc.date.available 2010-04-02T18:34:25Z
dc.date.issued 2008-04-21 en_US
dc.identifier.other etd-01092008-121656 en_US
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.16/3677
dc.description.abstract en_US
dc.rights I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dis sertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to NC State University or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report. en_US
dc.subject high-k en_US
dc.subject AES en_US
dc.subject XPS en_US
dc.subject FTIR en_US
dc.subject low temperature en_US
dc.subject QMS en_US
dc.subject ALD en_US
dc.title Spectroscopic Investigation of Hf-Si Oxynitride Alloys and Low Temperature Cobalt Metal ALD en_US
dc.degree.name PhD en_US
dc.degree.level dissertation en_US
dc.degree.discipline Materials Science and Engineering en_US

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