Optimization of Metal Gate Electrode Stacks for Work Function Tuning
| Title: | Optimization of Metal Gate Electrode Stacks for Work Function Tuning |
| Author: | Lee, JaeHoon |
| Advisors: | Doug Barlage, Committee Member Veena Misra, Committee Chair Carlton Osburn, Committee Member Gregory Parsons, Committee Member |
| Date: | 2007-08-22 |
| Degree: | PhD |
| Discipline: | Electrical Engineering |
| URI: | http://www.lib.ncsu.edu/resolver/1840.16/4052 |
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|---|---|---|---|
| etd.pdf | 1.948Mb |
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