Physical Mechanisms of Failure, Ultralow Partial Pressure Lubrication, and the Reservoir Effect in MEMS.

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Title: Physical Mechanisms of Failure, Ultralow Partial Pressure Lubrication, and the Reservoir Effect in MEMS.
Author: Hook, David
Advisors: Jacqueline Krim, Chair
Hans Hallen, Member
Donald Brenner, Member
Kenan Gundogdu, Member
Date: 2011-08-19
Degree: Doctor of Philosophy
Discipline: Physics
URI: http://www.lib.ncsu.edu/resolver/1840.16/7409


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