Fabrication of Subwavelength Periodic Nanostructures using Immersion Interference Lithography.

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Title: Fabrication of Subwavelength Periodic Nanostructures using Immersion Interference Lithography.
Author: Bagal, Abhijeet Subhashrao
Advisors: Chih-Hao Chang, Chair
Xiaoning Jiang, Member
Yong Zhu, Member
Date: 2012-11-09
Degree: Master of Science
Discipline: Mechanical Engineering
URI: http://www.lib.ncsu.edu/resolver/1840.16/8217


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