Micromachining Using EVAM (Elliptical Vibration Assisted Machining)

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dc.contributor.advisor Thomas Dow, Committee Chair en_US
dc.contributor.advisor Gregory D. Buckner, Committee Member en_US
dc.contributor.advisor Ronald O. Scattergood, Committee Member en_US
dc.contributor.author Brocato, Brett C en_US
dc.date.accessioned 2010-04-02T17:59:27Z
dc.date.available 2010-04-02T17:59:27Z
dc.date.issued 2005-05-10 en_US
dc.identifier.other etd-05092005-141640 en_US
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.16/914
dc.description.abstract The goal of this research is to demonstrate Elliptical Vibration Assisted Machining (EVAM) as a multi-level planar microstructuring tool for MEMS applications. While many MEMS (Micro Electro Mechanical Systems) devices are fabricated using silicon etching techniques developed for the microelectronics industry, micromachining is an attractive alternative because of its low start-up cost, applicability to a wide range of materials, high flexibility of feature geometry, and low prototyping cost. Vibration assisted diamond turning is proposed as an alternative method of fabricating 3D MEMS devices. To demonstrate the capabilities of this technique, a diamond tool holder that moves in an elliptical path at 1000 Hz (the Ultramill) was attached to a 3-axis diamond turning machine (DTM). Using this system, structured surfaces with high accuracy and surface finish were created. Multi-level structures with 15 μm plan-view features, 500 nm elevation features, and 20 nm RMS surface finish have been achieved on a 200 micrometer part scale. In addition, the limits of the fabrication technique in its current form were identified by machining specific features and relating them to the tool, the process and the DTM. Limitations of the current process include a sub-Hertz drift error in the air-bearing third axis, temperature control of the Ultramill, and natural frequencies of the DTM axes in the range of measured error frequencies in machined parts. en_US
dc.rights I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to NC State University or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report. en_US
dc.subject EVAM en_US
dc.subject microstructuring en_US
dc.subject micromachining en_US
dc.subject "vibration assisted machining" en_US
dc.subject "diamond turning" en_US
dc.subject micro en_US
dc.title Micromachining Using EVAM (Elliptical Vibration Assisted Machining) en_US
dc.degree.name MS en_US
dc.degree.level thesis en_US
dc.degree.discipline Mechanical Engineering en_US


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