Methods of controlling oxygen partial pressure during annealing of a perovskite dielectric layer
| Title: | Methods of controlling oxygen partial pressure during annealing of a perovskite dielectric layer |
| Date: | 2005 |
| Citation: | Maria, J.-P., & Kingon, A. I. (2005). Methods of controlling oxygen partial pressure during annealing of a perovskite dielectric layer. U.S. Patent No. 6,936,301. Washington, DC: U.S. Patent and Trademark Office. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/1019 |
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