High/low work function metal alloys for integrated circuit electrodes

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Title: High/low work function metal alloys for integrated circuit electrodes
Date: 2005
Citation: Misra, V., Zhong, H., & Hong, S. (2005). High/low work function metal alloys for integrated circuit electrodes. U.S. Patent No. 6,873,020. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1041


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