High/low work function metal alloys for integrated circuit electrodes
| dc.date.accessioned | 2008-07-24T16:28:37Z | |
| dc.date.available | 2008-07-24T16:28:37Z | |
| dc.date.issued | 2005 | |
| dc.identifier.citation | Misra, V., Zhong, H., & Hong, S. (2005). High/low work function metal alloys for integrated circuit electrodes. U.S. Patent No. 6,873,020. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1041 | |
| dc.format.extent | 74671 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en | |
| dc.title | High/low work function metal alloys for integrated circuit electrodes | |
| dc.type | Patent |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
| US_6873020_B2_I.pdf | 72.92Kb |
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