High/low work function metal alloys for integrated circuit electrodes

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dc.date.accessioned 2008-07-24T16:28:37Z
dc.date.available 2008-07-24T16:28:37Z
dc.date.issued 2005
dc.identifier.citation Misra, V., Zhong, H., & Hong, S. (2005). High/low work function metal alloys for integrated circuit electrodes. U.S. Patent No. 6,873,020. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1041
dc.format.extent 74671 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title High/low work function metal alloys for integrated circuit electrodes
dc.type Patent


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