Methods of fabricating gallium nitride semiconductor layers by lateral growth into trenches
dc.date.accessioned | 2008-07-24T16:51:11Z | |
dc.date.available | 2008-07-24T16:51:11Z | |
dc.date.issued | 2007 | |
dc.identifier.citation | Zheleva, T., Thomson, D. B., Smith, S. A., Linthicum, K. J., Gehrke, T., & Davis, R. F. (2007). Methods of fabricating gallium nitride semiconductor layers by lateral growth into trenches. U.S. Patent No. 7,195,993. Washington, DC: U.S. Patent and Trademark Office. | |
dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1056 | |
dc.format.extent | 72779 bytes | |
dc.format.mimetype | application/pdf | |
dc.language.iso | en | |
dc.title | Methods of fabricating gallium nitride semiconductor layers by lateral growth into trenches | |
dc.type | Patent |
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