Methods of fabricating strained semiconductor-on-insulator field-effect transistors and related devices

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Title: Methods of fabricating strained semiconductor-on-insulator field-effect transistors and related devices
Date: 2007
Citation: Ozturk, M., Misra, V., & Chopra, S. (2007). Methods of fabricating strained semiconductor-on-insulator field-effect transistors and related devices. U.S. Patent No. 7,211,458. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1059


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