Methods of fabricating strained semiconductor-on-insulator field-effect transistors and related devices

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US_7211458_B2_I.pdf (65.27 KB)

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2007

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Ozturk, M., Misra, V., & Chopra, S. (2007). Methods of fabricating strained semiconductor-on-insulator field-effect transistors and related devices. U.S. Patent No. 7,211,458. Washington, DC: U.S. Patent and Trademark Office.

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http://www.lib.ncsu.edu/resolver/1840.2/1059

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