Single crystal titanium nitride epitaxial on silicon

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Title: Single crystal titanium nitride epitaxial on silicon
Date: 1995
Citation: Narayan, J. (1995). Single crystal titanium nitride epitaxial on silicon. U.S. Patent No. 5,406,123. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1076


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