Single crystal titanium nitride epitaxial on silicon
| dc.date.accessioned | 2008-07-24T19:04:54Z | |
| dc.date.available | 2008-07-24T19:04:54Z | |
| dc.date.issued | 1995 | |
| dc.identifier.citation | Narayan, J. (1995). Single crystal titanium nitride epitaxial on silicon. U.S. Patent No. 5,406,123. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1076 | |
| dc.format.extent | 98737 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en | |
| dc.title | Single crystal titanium nitride epitaxial on silicon | |
| dc.type | Patent |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
| US_5406123_A_I.pdf | 96.42Kb |
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