Single crystal titanium nitride epitaxial on silicon

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dc.date.accessioned 2008-07-24T19:04:54Z
dc.date.available 2008-07-24T19:04:54Z
dc.date.issued 1995
dc.identifier.citation Narayan, J. (1995). Single crystal titanium nitride epitaxial on silicon. U.S. Patent No. 5,406,123. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1076
dc.format.extent 98737 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Single crystal titanium nitride epitaxial on silicon
dc.type Patent


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