Growth of beta-sic thin films and semiconductor devices fabricated thereon

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Title: Growth of beta-sic thin films and semiconductor devices fabricated thereon
Date: 1990
Citation: Davis, R. F., Kong, H. S., Glass, J. T., & Carter, C. H. (1990). Growth of beta-sic thin films and semiconductor devices fabricated thereon. U.S. Patent No. 4,912,063. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1157


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