Thin film dielectrics for capacitors and methods of making thereof

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Title: Thin film dielectrics for capacitors and methods of making thereof
Date: 2006
Citation: Borland, W. J., Ihlefeld, J. F., Kingon, A. I., & Maria, J. P. (2006). Thin film dielectrics for capacitors and methods of making thereof. U.S. Patent No. 7,029,971. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1206


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