Method and apparatus for controlling rapid thermal processing systems

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Title:	Method and apparatus for controlling rapid thermal processing systems
Date:	1992
Citation:	Sorrell, F. Y. Gyurcsi, R. S., & Harris, H. A. (1992). Method and apparatus for controlling rapid thermal processing systems. U.S. Patent No. 5,155,337. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1209



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