Method and apparatus for controlling rapid thermal processing systems

Show full item record

Title: Method and apparatus for controlling rapid thermal processing systems
Date: 1992
Citation: Sorrell, F. Y. Gyurcsi, R. S., & Harris, H. A. (1992). Method and apparatus for controlling rapid thermal processing systems. U.S. Patent No. 5,155,337. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1209


Files in this item

Files Size Format View
US_5155337_A_I.pdf 99.98Kb PDF View/Open

This item appears in the following Collection(s)

Show full item record