Method and apparatus for controlling rapid thermal processing systems
| dc.date.accessioned | 2008-07-28T19:44:01Z | |
| dc.date.available | 2008-07-28T19:44:01Z | |
| dc.date.issued | 1992 | |
| dc.identifier.citation | Sorrell, F. Y. Gyurcsi, R. S., & Harris, H. A. (1992). Method and apparatus for controlling rapid thermal processing systems. U.S. Patent No. 5,155,337. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1209 | |
| dc.format.extent | 102388 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en | |
| dc.title | Method and apparatus for controlling rapid thermal processing systems | |
| dc.type | Patent |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
| US_5155337_A_I.pdf | 99.98Kb |
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