Method and apparatus for controlling rapid thermal processing systems

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dc.date.accessioned 2008-07-28T19:44:01Z
dc.date.available 2008-07-28T19:44:01Z
dc.date.issued 1992
dc.identifier.citation Sorrell, F. Y. Gyurcsi, R. S., & Harris, H. A. (1992). Method and apparatus for controlling rapid thermal processing systems. U.S. Patent No. 5,155,337. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1209
dc.format.extent 102388 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Method and apparatus for controlling rapid thermal processing systems
dc.type Patent


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