Selective germanium deposition on silicon and resulting structures
Title: | Selective germanium deposition on silicon and resulting structures |
Date: | 1992 |
Citation: | Ozturk, M., Wortman, J., & Grider, D. (1992). Selective germanium deposition on silicon and resulting structures. U.S. Patent No. 5,089,872. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/1233 |
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