Selective germanium deposition on silicon and resulting structures
| dc.date.accessioned | 2008-07-28T20:33:54Z | |
| dc.date.available | 2008-07-28T20:33:54Z | |
| dc.date.issued | 1992 | |
| dc.identifier.citation | Ozturk, M., Wortman, J., & Grider, D. (1992). Selective germanium deposition on silicon and resulting structures. U.S. Patent No. 5,089,872. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1233 | |
| dc.format.extent | 106448 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en | |
| dc.title | Selective germanium deposition on silicon and resulting structures | |
| dc.type | Patent |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
| US_5089872_A_I.pdf | 103.9Kb |
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