Conical rapid thermal processing apparatus

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Title:	Conical rapid thermal processing apparatus
Date:	1993
Citation:	Wortman, J., Sorrell, F., Hauser, J., & Fordham, M. (1993). Conical rapid thermal processing apparatus. U.S. Patent No. 5,253,324. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1236



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