X-ray absorption spectra for transition metal high-kappa dielectrics: Final state differences for intra- and inter-atomic transitions

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Title: X-ray absorption spectra for transition metal high-kappa dielectrics: Final state differences for intra- and inter-atomic transitions
Date: 2004
Citation: Lucovsky, G., Hong, J. G., Fulton, C. C., Zou, Y., Nemanich, R. J., & Ade, H. (2004). X-ray absorption spectra for transition metal high-kappa dielectrics: Final state differences for intra- and inter-atomic transitions. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 22(4), 2132-2138.
URI: http://www.lib.ncsu.edu/resolver/1840.2/126


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