Semiconductor structures with trench contacts

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Title:	Semiconductor structures with trench contacts
Date:	2003
Citation:	Huang, Q. (2003). Semiconductor structures with trench contacts. U.S. Patent No. 6,630,711. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1270



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