Semiconductor structures with trench contacts

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US_6630711_B2_I.pdf (112.95 KB)

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2003

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Huang, Q. (2003). Semiconductor structures with trench contacts. U.S. Patent No. 6,630,711. Washington, DC: U.S. Patent and Trademark Office.

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http://www.lib.ncsu.edu/resolver/1840.2/1270

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