Semiconductor structures with trench contacts
Title: | Semiconductor structures with trench contacts |
Date: | 2003 |
Citation: | Huang, Q. (2003). Semiconductor structures with trench contacts. U.S. Patent No. 6,630,711. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/1270 |
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