Semiconductor structures with trench contacts

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dc.date.accessioned 2008-10-13T18:56:24Z
dc.date.available 2008-10-13T18:56:24Z
dc.date.issued 2003
dc.identifier.citation Huang, Q. (2003). Semiconductor structures with trench contacts. U.S. Patent No. 6,630,711. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1270
dc.format.extent 115664 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Semiconductor structures with trench contacts
dc.type Patent


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