Electrochemical method for defect delineation in silicon-on-insulator wafers
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1991
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Guilinger, T. R., Jones, H. D. T., Kelly, M. J., Medernach, J. W., Stevenson, J. O., & Tsao, S. S. (1991). Electrochemical method for defect delineation in silicon-on-insulator wafers. U.S. Patent No. 5,015,346. Washington, DC: U.S. Patent and Trademark Office.
