Electronic structure of high-k transition metal oxides and their silicate and aluminate alloys

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2002

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Lucovsky, G., Zhang, Y., Rayner, G. B., Appel, G., Ade, H., & Whitten, J. L. (2002). Electronic structure of high-k transition metal oxides and their silicate and aluminate alloys. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 20(4), 1739-1747.

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