Ferroelectric film prope rty measuring device, measuring method therefor and measuring method for semiconductor memory units

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Title: Ferroelectric film prope rty measuring device, measuring method therefor and measuring method for semiconductor memory units
Date: 2002
Citation: Gruverman, A. (2002). Ferroelectric film property measuring device, measuring method therefor and measuring method for semiconductor memory units. U.S. Patent No. 6,466,039. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1286


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