Ferroelectric film prope rty measuring device, measuring method therefor and measuring method for semiconductor memory units
| Title: | Ferroelectric film prope rty measuring device, measuring method therefor and measuring method for semiconductor memory units |
| Date: | 2002 |
| Citation: | Gruverman, A. (2002). Ferroelectric film property measuring device, measuring method therefor and measuring method for semiconductor memory units. U.S. Patent No. 6,466,039. Washington, DC: U.S. Patent and Trademark Office. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/1286 |
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