Ferroelectric film prope rty measuring device, measuring method therefor and measuring method for semiconductor memory units
| dc.date.accessioned | 2008-10-13T19:18:33Z | |
| dc.date.available | 2008-10-13T19:18:33Z | |
| dc.date.issued | 2002 | |
| dc.identifier.citation | Gruverman, A. (2002). Ferroelectric film property measuring device, measuring method therefor and measuring method for semiconductor memory units. U.S. Patent No. 6,466,039. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1286 | |
| dc.format.extent | 144242 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en | |
| dc.title | Ferroelectric film prope rty measuring device, measuring method therefor and measuring method for semiconductor memory units | |
| dc.type | Patent |
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| Files | Size | Format | View |
|---|---|---|---|
| US_6466039_B1_I.pdf | 140.8Kb |
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