Ferroelectric film prope rty measuring device, measuring method therefor and measuring method for semiconductor memory units

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dc.date.accessioned 2008-10-13T19:18:33Z
dc.date.available 2008-10-13T19:18:33Z
dc.date.issued 2002
dc.identifier.citation Gruverman, A. (2002). Ferroelectric film property measuring device, measuring method therefor and measuring method for semiconductor memory units. U.S. Patent No. 6,466,039. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1286
dc.format.extent 144242 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Ferroelectric film prope rty measuring device, measuring method therefor and measuring method for semiconductor memory units
dc.type Patent


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