Ultrahigh density ferroelectric storage and lithography by high order ferroic switching
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2007
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Kalinin, S. V., Baddorf, A. P., Lee, H. N., Shin, J., Gruverman, A. L., Karapetian, E., & Kachanov, M. (2007). Ultrahigh density ferroelectric storage and lithography by high order ferroic switching. U.S. Patent No. 7,292,768. Washington, DC: U.S. Patent and Trademark Office.
