Methods of forming conductive metal silicides by reaction of metal with silicon

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Title: Methods of forming conductive metal silicides by reaction of metal with silicon
Date: 2005
Citation: Derderian, G. J., & Basceri, C. (2005). Methods of forming conductive metal silicides by reaction of metal with silicon. U.S. Patent No. 6,969,677. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1290


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