Thin film capacitor with substantially homogenous stoichiometry

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Title: Thin film capacitor with substantially homogenous stoichiometry
Date: 2005
Citation: Basceri, C. (2005). Thin film capacitor with substantially homogenous stoichiometry. U.S. Patent No. 6,952,029. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1292


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