Integrated capacitors fabricated with conductive metal oxides

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Title: Integrated capacitors fabricated with conductive metal oxides
Date: 2005
Citation: Rhodes, H. E., Visokay, M., Graettinger, T., Gealy, D., Sandhu, G., Basceri, C., & Cummings, S. (2005). Integrated capacitors fabricated with conductive metal oxides. U.S. Patent No. 6,940,112. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1293


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