Atomic layer deposition apparatus and methods

Show full item record

Title: Atomic layer deposition apparatus and methods
Date: 2005
Citation: Derderian, G. J., Basceri, C., Sandhu, G. S., & Sarigiannis, D. (2005). Atomic layer deposition apparatus and methods. U.S. Patent No. 6,896,730. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1299


Files in this item

Files Size Format View
US_6896730_B2_I.pdf 140.8Kb PDF View/Open

This item appears in the following Collection(s)

Show full item record