Deposition methods

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Title: Deposition methods
Date: 2005
Citation: Sarigiannis, D., Derderian, G. J., Basceri, C., Sandhu, G. S., Gealy, F. D., & Carlson, C. M. (2005). Deposition methods. U.S. Patent No. 6,890,596. Washington, D C: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1300


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