Semiconductor manufacturing process and apparatus for modifying in-film stress of thin films, and product formed thereby

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Title: Semiconductor manufacturing process and apparatus for modifying in-film stress of thin films, and product formed thereby
Date: 2005
Citation: Basceri, C. (2005). Semiconductor manufacturing process and apparatus for modifying in-film stress of thin films, and product formed thereby. U.S. Patent No. 6,884,718. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1302


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