Reactors having gas distributors and methods for epositing materials onto micro-device workpieces

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Title: Reactors having gas distributors and methods for epositing materials onto micro-device workpieces
Date: 2005
Citation: Basceri, C., & Sandhu, G. S. (2005). Reactors having gas distributors and methods for depositing materials onto micro-device workpieces. U.S. Patent No. 6,884,296. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1304


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