Method of forming a MIM capacitor with metal nitride electrode

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Title: Method of forming a MIM capacitor with metal nitride electrode
Date: 2005
Citation: Basceri, C., & Braettinger, T. M. (2005). Method of forming a MIM capacitor with metal nitride electrode. U.S. Patent No. 6,881,642. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1305


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