Method of forming a MIM capacitor with metal nitride electrode

No Thumbnail Available

Date

2005

Authors

Advisors

Journal Title

Series/Report No.

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Citation

Basceri, C., & Braettinger, T. M. (2005). Method of forming a MIM capacitor with metal nitride electrode. U.S. Patent No. 6,881,642. Washington, DC: U.S. Patent and Trademark Office.

Degree

Discipline

Collections