Integrated capacitors fabricated with conductive metal oxides
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2005
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Rhodes, H. E., Visokay, M., Graettinger, T., Gealy, D, Sandhu, G., Basceri, C., & Cummings, S. (2005). Integrated capacitors fabricated with conductive metal oxides. U.S. Patent No. 6,869,877. Washington, DC: U.S. Patent and Trademark Office.
