Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers

Show full item record

Title: Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers
Date: 2005
Citation: Basceri, C., & Azola, N. (2005). Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers. U.S. Patent No. 6,838,122. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1312


Files in this item

Files Size Format View
US_6838122_B2_I.pdf 140.1Kb PDF View/Open

This item appears in the following Collection(s)

Show full item record