Methods of forming trenched isolation regions

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Title: Methods of forming trenched isolation regions
Date: 2004
Citation: Sarigiannis, D., Derderian, G. J., & Basceri, C. (2004). Methods of forming trenched isolation regions. U.S. Patent No. 6,835,664. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1314


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